Advanced co-sublimation hardware for deposition of graded ternary alloys in thin-film applications MunshiAmit H KephartJason M ReichCarey L HemenwayDavis R ShimpiTushar M AbbasAli CameronKevan C DanielsonAdam H BarthKurt L WallsMichael SampathWalajabad S 2020 © 2018 IEEE. CdTe photovoltaic devices with efficiency over 22% have been demonstrated. Sublimated CdTe photovoltaics with efficiency over 19% have been reported using graded alloying of Se in CdTe absorber films. Grading of alloy films has been identified as an important characteristic to achieve higher device performance using more complex device structures. An advanced co-sublimation source has been designed and developed to deposit highly controlled CdTe based ternary alloys. An advanced shutter mechanism enables changing the composition of the deposited films during sublimation. The hardware used for advanced co-sublimation and initial materials characterization is presented in this study.