The mathematical modelling of focussed ion beam systems
Robert J. Amos
G.A. Evans
Roger Smith
2134/14048
https://repository.lboro.ac.uk/articles/journal_contribution/The_mathematical_modelling_of_focussed_ion_beam_systems/9377303
Computer simulation of focused ion beam systems plays an important role in the design of many
scientific instruments. This paper describes a computational technique which has been developed for
medium sized computers and which has been applied to a number of instrument design applications . The
applications include individual ion lcn cs, extraction optics for ions in surface analytical instruments and the
design of columns for ion beam lithography.
2014-01-29 10:19:29
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Mathematical Sciences not elsewhere classified