The mathematical modelling of focussed ion beam systems Robert J. Amos G.A. Evans Roger Smith 2134/14048 https://repository.lboro.ac.uk/articles/journal_contribution/The_mathematical_modelling_of_focussed_ion_beam_systems/9377303 Computer simulation of focused ion beam systems plays an important role in the design of many scientific instruments. This paper describes a computational technique which has been developed for medium sized computers and which has been applied to a number of instrument design applications . The applications include individual ion lcn cs, extraction optics for ions in surface analytical instruments and the design of columns for ion beam lithography. 2014-01-29 10:19:29 untagged Mathematical Sciences not elsewhere classified