%0 Journal Article %A Amos, Robert J. %A Evans, G.A. %A Smith, Roger %D 2014 %T The mathematical modelling of focussed ion beam systems %U https://repository.lboro.ac.uk/articles/journal_contribution/The_mathematical_modelling_of_focussed_ion_beam_systems/9377303 %K untagged %K Mathematical Sciences not elsewhere classified %X Computer simulation of focused ion beam systems plays an important role in the design of many scientific instruments. This paper describes a computational technique which has been developed for medium sized computers and which has been applied to a number of instrument design applications . The applications include individual ion lcn cs, extraction optics for ions in surface analytical instruments and the design of columns for ion beam lithography. %I Loughborough University