2134/11910
Chris Scott
Chris
Scott
Roger Smith
Roger
Smith
Modelling the sputtering of Au surfaces using a multi time-scale technique
Loughborough University
2013
Sputtering
Long time-scale dynamics
Surface topography
Mathematical Sciences not elsewhere classified
2013-03-08 15:23:08
Journal contribution
https://repository.lboro.ac.uk/articles/journal_contribution/Modelling_the_sputtering_of_Au_surfaces_using_a_multi_time-scale_technique/9388649
We present results from an atomistic computer
simulation model of the sputtering of gold crystal
surfaces under 500 eV ion bombardment by Au and
Ar ions for doses up to 1014 ions cm−2. The multi
time-scale technique uses molecular dynamics to
calculate the fast ballistic collision processes in the
early stages of the cascade, whereas an on-the fly
kinetic Monte Carlo technique is used to model the
relaxation and diffusion processes between successive
ion impacts when the defect motion has begun to
be dominated by rare events. The results indicate
a large amount of crystalline recovery between
impacts, some facetting of the crystal surfaces but
no large sub-surface defect accumulation. Because of
this recovery process, sputtering yields and energy
distributions are in good agreement with those
obtained assuming a perfect crystal surface and also
with those experimentally measured.