Development towards a focus variation based micro-co-ordinate measuring machine
Florine Hiersemenzel
2134/14920
https://repository.lboro.ac.uk/articles/thesis/Development_towards_a_focus_variation_based_micro-co-ordinate_measuring_machine/9530021
The increasing number of small and fragile parts that are being manufactured using micromachining
technology has raised the demand for co-ordinate measurement machines (CMM) that
can measure on a micro- and millimetric scale without contacting the part, thus avoiding damage to
the surface of the part. These instruments are expected to measure on a micro- and millimetric scale
with a measuring uncertainty in the nanometre range. A number of techniques used for contactless
surface measurements exist, such as the focus variation (FV) technique, which have the ability to
perform measurements on the micro- and millimetric scale in a short amount of time. These
instruments may have the potential to be implemented in a non-contact micro-CMM platform. [Continues.]
2014-06-20 07:42:30
Focus variation
Micro-CMM
Performance characteristics
Traceability
Re-verification artefact
Mechanical Engineering not elsewhere classified