Abnormal heating of low-energy electrons in low-pressure capacitively coupled discharges
G.Y. Park
S.J. You
Felipe Iza
Jae Koo Lee
2134/3224
https://repository.lboro.ac.uk/articles/journal_contribution/Abnormal_heating_of_low-energy_electrons_in_low-pressure_capacitively_coupled_discharges/9547823
In low-pressure capacitively coupled plasmas, high-energy electrons are collisionlessly heated by large
rf fields in the sheaths while low-energy electrons are confined in the bulk plasma by the ambipolar
potential. Low-energy electrons are typically inefficiently heated due to their low collisionality and the
weak rf electric field present in the bulk. It is shown, however, that as a result of the nonlinear interaction
between the electron motion and the weak rf field present in the bulk, low-energy electrons can be
efficiently heated. Electrons in the bulk that bounce inside the electrostatic potential well with a frequency
equal to the rf excitation frequency are efficiently heated by the coherent interaction with the rf field. This
resonant collisionless heating can be very efficient and manifest itself as a plateau in the electron energy probability function.
2008-02-25 11:58:22
untagged
Mechanical Engineering not elsewhere classified