%0 Conference Paper %A Ruiz, Pablo %A Huntley, Jonathan %D 2017 %T High-throughput single-shot hyperspectral interferometer for areal profilometry based on microlens array integral field unit %U https://repository.lboro.ac.uk/articles/conference_contribution/High-throughput_single-shot_hyperspectral_interferometer_for_areal_profilometry_based_on_microlens_array_integral_field_unit/9549935 %2 https://repository.lboro.ac.uk/ndownloader/files/17180981 %K Height measurements %K Metrology %K Single-shot %K Hyperspectral interferometry %K Microlens array %K Integral field unit %K Mechanical Engineering not elsewhere classified %X A single-shot technique to measure areal profiles on optically smooth and rough surfaces and for applications in non-cooperative environments is presented. It is based on hyperspectral interferometry (HSI), a technique in which the output of a white-light interferometer provides the input to a hyperspectral imaging system. Previous HSI implementations suffered from inefficient utilisation of the available pixels which limited the number of measured coordinates and/or unambiguous depth range. In this paper a >20-fold increase in pixel utilization is achieved through the use of a 2-D microlens array as proposed for integral field units in astronomy applications. This leads to a 35×35 channel system with an unambiguous depth range of 0.88 mm. %I Loughborough University