2134/37744
Jinxin Liu
Jinxin
Liu
Zhiheng Huang
Zhiheng
Huang
Paul Conway
Paul
Conway
Yang Liu
Yang
Liu
Protrusion of Cu-TSV under different strain states
Loughborough University
2019
untagged
Mechanical Engineering not elsewhere classified
2019-05-14 11:52:00
Conference contribution
https://repository.lboro.ac.uk/articles/conference_contribution/Protrusion_of_Cu-TSV_under_different_strain_states/9554657
A phase-field-crystal (PFC) model is used to investigate the protrusion of blind TSVs under different strain states. The direction of loading applied to the TSVs has an effect on the protrusion, which is closely related to the copper grains and their orientations at the TSV edges. A nonlinear relation between protrusion and strain rate has been found, which can be explained by different mechanisms of deformation. A higher strain occurring near the top end of the TSVs leads to a larger protrusion of the bind TSVs.