Focal position-controlled processing head for a laser pattern generator (LPG) for flexible micro-structuring
Uve Samuels
2134/27255
https://repository.lboro.ac.uk/articles/thesis/Focal_position-controlled_processing_head_for_a_laser_pattern_generator_LPG_for_flexible_micro-structuring/9577967
In micro-structuring processes a direct structuring of the substrate is, in most cases, not
possible and therefore the profile is first obtained in photo resist and then, in a second step,
transferred into the substrate. The resist structuring can be performed using the flexible
characteristics of a laser pattern generator (LPG). In these processes, there is a beneficial
relationship between the apparatus/equipment expense and the obtainable processing results.
For a reproduceable processing result in all micro structuring tasks, good reproducibility of all
process relevant parameters is required. In the application of a laser pattern generator, precise
control of the focal position of the strongly focussed laser beam relative to the processing
surface must be maintained. [Continues.]
2017-11-02 12:24:55
untagged
Mechanical Engineering not elsewhere classified