Combinatorial study of Sn-Ti-W-O transparent conducting oxide thin films for photovoltaic applications
conference contributionposted on 23.10.2017 by Michael Gona, Patrick Isherwood, Jake Bowers, Michael Walls
Any type of content contributed to an academic conference, such as papers, presentations, lectures or proceedings.
a combinatorial study of transparent conducting oxide thin films based on SnO2–TiO2-WO3 phase space is reported. These multinary oxide films were fabricated by magnetron reactive co-sputtering of tin monoxide (SnO), titanium (Ti) and tungsten (W) targets. SnO2–TiO2-WO3 film compositions with Ti/Sn ratio (0.02 – 0.12) and W/(Ti+Sn) ratio (0.02 – 0.25) were explored. The effect of oxygen partial pressure on composition, structure and optical properties was evaluated. High optical transparency above 80% across the visible spectrum was obtained for sputtered ternary SnO2-TiO2 oxide films for oxygen partial pressure >19.4%. A positive correlation between optical bandgap and Ti/Sn ratio was observed. However, optical properties deteriorated as Ti-content increased in the as-deposited SnO2-TiO2-WO3 films. All studied as-deposited SnO2-TiO2-WO3 thin films were found to be highly resistive. X-ray diffraction data indicated no long-range structural order.
- Mechanical, Electrical and Manufacturing Engineering