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Determination of the lateral resolution of an interference microscope using a micro-scale sphere
conference contribution
posted on 2019-07-09, 12:25 authored by Rong Su, Matthew Thomas, Peter De Groot, Jeremy CouplandJeremy Coupland, Richard K. LeachDetermination of the lateral resolution of an interference microscope using a micro-scale sphere
Funding
This work was supported by the Engineering and Physical Sciences Research Council (EPSRC) (EP/M008983/1) and the European Metrology Programme for Innovation and Research (EMPIR) project FreeFORM (15SIB01).
History
School
- Mechanical, Electrical and Manufacturing Engineering
Published in
Proceedings - 33rd ASPE Annual MeetingPages
225 - 229Citation
SU, R. ... et al., 2018. Determination of the lateral resolution of an interference microscope using a micro-scale sphere. IN: Proceedings - 33rd ASPE Annual Meeting, Las Vegas, Nevada, 4-9th Nov 2018. Red Hook, NY.: Curran Associates, pp. 225 - 229.Publisher
© American Society for Precision Engineering (ASPE)Version
- AM (Accepted Manuscript)
Publisher statement
This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0) licence. Full details of this licence are available at: https://creativecommons.org/licenses/by-nc-nd/4.0/Publication date
2018Notes
This paper is in closed access.ISBN
9781887706773Publisher version
Language
- en