Novel techniques for the control of the properties of reactively-sputtered thin films

2018-05-09T09:14:10Z (GMT) by Nigel Danson
Precise control techniques are of fundamental importance in the accurate deposition of optical, mechanical, electrical and magnetic thin films. The objective of this work was twofold: to devise and evaluate novel control systems for reactive sputtering primarily oxide films, and investigate the effects of these processes on resultant film properties. [Continues.]

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CC BY-NC-ND 4.0