Serial laser lithography for efficient manufacture of universal microstructures
2012-12-14T10:09:43Z (GMT) by
The technique of microstructuring revolutionises all classical fields of engineering like electronics, optics and mechanics. In order to manufacture a microstructure in large quantities and at a reasonable price, master elements or masks will be formed that can be duplicated in a highly efficient process. Further development in technology leads, on the one hand, to further reduction of possible dimensions of structures down to the range of sub-nano technology and, on the other hand, to the development of more flexible systems in using more reasonably priced technologies for the structuring in the classical micrometre range, which in turn opens a much larger field of use. This study examines the use of serial laser lithography for efficient manufacture of universal microstructures. To facilitate this, a laser beam writer or so-called Laser Pattern Generator (LPG) was developed and described here as well as in a previous work[Samu96a]. The laser beam writer uses a precise positioning system for the movement of a substrate for material processing using a focussed laser beam. This system permits the production of structures with dimensions down to 0.5 μm which can be used in several application fields. This was systematically analysed for optimisation of the production process. Based on the achieved results, a computer-aided simulation system for process parameter determination and optimisation was developed that may be used in order to minimise the experimental effort in LPG manufacturing. The total production process and the individual optimising steps are illustrated by the manufacture of different microstructures. Because of the high reproducibility in manufacturing different structure types and, compared with other manufacturing methods, the low equipment and manufacturing effort, serial laser lithography is an efficient process for the microstructuring of universal microstructures down to the dimensions in the micrometre range.