The mathematical modelling of focussed ion beam systems
2014-01-29T10:19:29Z (GMT) by
Computer simulation of focused ion beam systems plays an important role in the design of many scientific instruments. This paper describes a computational technique which has been developed for medium sized computers and which has been applied to a number of instrument design applications . The applications include individual ion lcn cs, extraction optics for ions in surface analytical instruments and the design of columns for ion beam lithography.