The mathematical modelling of focussed ion beam systems

2014-01-29T10:19:29Z (GMT) by Robert J. Amos G.A. Evans Roger Smith
Computer simulation of focused ion beam systems plays an important role in the design of many scientific instruments. This paper describes a computational technique which has been developed for medium sized computers and which has been applied to a number of instrument design applications . The applications include individual ion lcn cs, extraction optics for ions in surface analytical instruments and the design of columns for ion beam lithography.