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posted on 2012-02-14, 14:17 authored by Shefiu S. ZakariyahAn increase in interconnection density, a reduction in packaging sizes and the quest for lowcost
product development strategy are some of the key challenges facing micro-optoelectronics
design and manufacture. The influence of high-density, small-sized products has
placed significant constraints on conventional electrical connections prompting various
fabrication methods, e.g. photolithography, being introduced to meet these challenges and
ameliorate the rapidly changing demand from consumers. While high-power solid state
lasers are fundamental to large scale industrial production, excimer laser on the other hand
has revolutionised the manufacturing industry with high precision, easy 3D structuring and
less stringent production requirements. Micro-structuring using excimer laser, best known
as laser ablation, is a non-contact micro- and nano-machining based on the projection of
high-energy pulsed UV masked beam on to a material of interest such that pattern(s) on the
mask is transferred to the substrate, often at a demagnified dimension with high resolution
and precision. The use of mask with desired patterns and beam delivery system makes the
fabrication in this case accurate, precise and easily controllable. The first part of this chapter
introduces the fundamentals of laser technology and material processing. In the second part,
optical interconnects as a solution to ‘bottlenecked’ conventional copper interconnections is
introduced with emphasis on excimer laser ablation of polymer waveguides and integrated
mirrors. Key research findings in the area of optical circuit boards using other techniques
are also briefly covered.
History
School
- Mechanical, Electrical and Manufacturing Engineering
Citation
ZAKARIYAH, S.S., 2012. Laser Ablation for Polymer Waveguide Fabrication. IN: Kahrizi, M. (ed.) Micromachining Techniques for Fabrication of Micro and Nano Structures. InTech.Publisher
InTech - Open Access Publisher © the authorVersion
- VoR (Version of Record)
Publication date
2012Notes
This book chapter was published in the book, Micromachining Techniques for Fabrication of Micro and Nano Structures [InTech - Open Access Publisher © the author]. InTech papers are published under the Creative Commons Attribution 3.0 license. The publisher's website is at: http://www.intechopen.com/ISBN
9789533079066Publisher version
Language
- en