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Areal texture and angle measurements of tilted surfaces using focus variation methods

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conference contribution
posted on 25.01.2013 by Florine Hiersemenzel, Jon Petzing, Richard K. Leach, F. Helmli, Jagpal Singh
Optical instruments for areal surface topography measurement have seen significant commercial development in the last five years, along with the ISO 25178 areal standard. Providing the user with confidence in new instruments depends on understanding instrument behavior and sources of error. Focus variation techniques rely on the inherent micro- or nano-scale roughness of a surface to allow acquisition of topography data. The work reported here has been examining the sensitivity of the focus variation technique to surface slope, using areal parameters to characterize surface roughness at extended slope values. The results illustrate links between instrument variables and slope characterization.

History

School

  • Mechanical, Electrical and Manufacturing Engineering

Citation

HIERSEMENZEL, F. ... et al., 2012. Areal texture and angle measurements of tilted surfaces using focus variation methods. IN: Proceedings of the 3rd International Conference on Surface Metrology, Annecy, France, 21-23 March 2012, 5pp.

Publisher

Universite de Savoie

Version

AM (Accepted Manuscript)

Publication date

2012

Notes

This is an ICSM'12 conference paper. The website is at: http://www.polytech.univ-savoie.fr/index.php?id=icsm2012

ISBN

9782953616835

Language

en

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