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Determination of the lateral resolution of an interference microscope using a micro-scale sphere

conference contribution
posted on 09.07.2019 by Rong Su, Matthew Thomas, Peter De Groot, Jeremy Coupland, Richard K. Leach
Determination of the lateral resolution of an interference microscope using a micro-scale sphere

Funding

This work was supported by the Engineering and Physical Sciences Research Council (EPSRC) (EP/M008983/1) and the European Metrology Programme for Innovation and Research (EMPIR) project FreeFORM (15SIB01).

History

School

  • Mechanical, Electrical and Manufacturing Engineering

Published in

Proceedings - 33rd ASPE Annual Meeting

Pages

225 - 229

Citation

SU, R. ... et al., 2018. Determination of the lateral resolution of an interference microscope using a micro-scale sphere. IN: Proceedings - 33rd ASPE Annual Meeting, Las Vegas, Nevada, 4-9th Nov 2018. Red Hook, NY.: Curran Associates, pp. 225 - 229.

Publisher

© American Society for Precision Engineering (ASPE)

Version

AM (Accepted Manuscript)

Publisher statement

This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0) licence. Full details of this licence are available at: https://creativecommons.org/licenses/by-nc-nd/4.0/

Publication date

2018

Notes

This paper is in closed access.

ISBN

9781887706773

Language

en

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