Fluorescence probe for determining the ozone dose delivered by plasmas
conference contributionposted on 28.11.2014 by Carlos Castello Beltran, Benjamin Buckley, Felipe Iza
Any type of content contributed to an academic conference, such as papers, presentations, lectures or proceedings.
Plasma composition is typically studied by absorption and emission spectroscopy, mass spectrometry and computational studies. While these techniques provide valuable information about the chemical species in the gas phase, in many applications it is desirable to have a direct measurement of the dose of chemical species delivered to a particular target. In this work, we will use a fluorescent chemical probe in order to characterize actual flux of ozone experienced by a target exposed to plasma.
- Mechanical, Electrical and Manufacturing Engineering