2019-8 SPIE Annual - High accuracy CSI.pdf (1.88 MB)

High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy

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conference contribution
posted on 08.01.2020, 09:54 by Rong Su, Matthew Thomas, Mingyu Liu, Jeremy Coupland, Richard Leach
Surfaces featuring complex topographies, such as high slope angles, large curvatures and high aspect-ratio structures on both macro-and micro-scales, present significant challenges to optical measuring instruments. Here we demonstrate a method to characterise and correct the three-dimensional surface transfer function (3D STF) of a coherence scanning interferometer (CSI). Slope-dependent errors present in the original measurements are reduced after phase inversion of the 3D STF, and the final results agree with traceable contact stylus measurements within the 30 nm reproducibility of the stylus measurements. This method enables in-situ compensation for errors related to aberrations, defocus and diffraction.

Funding

Engineering and Physical Sciences Research Council (EPSRC) (EP/M008983/1)

European Union’s Horizon 2020 Research and Innovation Programme (MNR4SCell, 734174)

History

School

  • Mechanical, Electrical and Manufacturing Engineering

Published in

Proceedings of SPIE - The International Society for Optical Engineering

Volume

11102

Citation

Rong Su, Matthew Thomas, Mingyu Liu, Jeremy Coupland, and Richard Leach "High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy", Proc. SPIE 11102, Applied Optical Metrology III, 1110205 (3 September 2019); https://doi.org/10.1117/12.2528911.

Publisher

Society of Photo-Optical Instrumentation Engineers (SPIE)

Version

VoR (Version of Record)

Rights holder

© Society of Photo-Optical Instrumentation Engineers (SPIE)

Publisher statement

Copyright 2019 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.

Publication date

2019-09-03

Copyright date

2019

ISBN

9781510628977

ISSN

0277-786X

eISSN

1996-756X

Language

en

Depositor

Prof Jeremy Coupland. Deposit date: 6 January 2020

Article number

1110205

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