High-throughput single-shot hyperspectral interferometer for areal profilometry based on microlens array integral field unit
conference contributionposted on 27.04.2017 by Pablo Ruiz, Jonathan Huntley
Any type of content contributed to an academic conference, such as papers, presentations, lectures or proceedings.
A single-shot technique to measure areal profiles on optically smooth and rough surfaces and for applications in non-cooperative environments is presented. It is based on hyperspectral interferometry (HSI), a technique in which the output of a white-light interferometer provides the input to a hyperspectral imaging system. Previous HSI implementations suffered from inefficient utilisation of the available pixels which limited the number of measured coordinates and/or unambiguous depth range. In this paper a >20-fold increase in pixel utilization is achieved through the use of a 2-D microlens array as proposed for integral field units in astronomy applications. This leads to a 35×35 channel system with an unambiguous depth range of 0.88 mm.
P. D. Ruiz acknowledges The Royal Society (Industry Fellowship IF2012/R2) and industrial hosts Phase Vision Ltd. and Renishaw plc for their support. J. M. Huntley acknowledges the Engineering and Physical Sciences Research Council (EP/K018124/1) for its financial support.
- Mechanical, Electrical and Manufacturing Engineering