Adaptive delay lines implemented on a photonics chip for extended-range, high-speed absolute distance measurement

High-speed (upwards of 10⁵ coordinates s^-1) and long-range (~10 m) absolute distance measurement applications based on frequency scanning interferometry (FSI) generate very high modulation frequencies (typically >100 GHz) due to the laser frequency sweep rate and the large imbalance between the reference and object arms. Such systems are currently impractical due to the extremely high cost associated with sampling at these signal frequencies. Adaptive delay lines (ADLs) were recently proposed as a solution to balance the interferometer and therefore reduce sampling rate requirements by a factor of 2^N, where N is the number of switches in the ADL [1, 2]. The technique has been successfully demonstrated in the lab using bulk optics and optical fiber configurations, and further reduction in size and cost will increase the breadth of metrology applications that can be addressed. Silicon photonics constitute an effective platform to miniaturize ADLs to chip-scale, simplifying instrument manufacture and providing a more robust configuration compared to bulk-optics and fiber-based solutions. We discuss the design and fabrication of chip-scale ADLs on a silicon on insulator (SOI) photonics platform, using optical switches based on heaters, multi-mode interferometer (MMI) couplers and Mach-Zehnder interferometers (MZI). We also establish the heater voltages of 4 switches in series, required to switch the optical path in the reference arm, a necessary step to use the device for FSI range measurements.