Aluminium-doped zinc oxide (AZO) thin films were deposited on glass substrates by ultrasonic spray pyrolysis from metal salt precursors. The electrical and optical properties were investigated as a function of the deposition parameters and the optimum conditions were defined. The thin film exhibits approximately 80% transparency and a resistivity in the order of 2 x 10(-2) Ωcm. The electrical properties can be improved further with post-deposition annealing in vacuum, or with the increase in thickness which causes insignificant transmission losses. AZO nanoparticles can be used as a seed layer and affect the optical properties of the material. The optimized process results in good quality AZO films for their application as the transparent conductive oxide (TCO) layer in thin film solar cells.
Funding
The authors are grateful to EPSRC Supergen SuperSolar Hub for funding to support this project and to Innovnano SA for providing the AZO nanoparticles.
History
School
Mechanical, Electrical and Manufacturing Engineering
Published in
IEEE Photovoltaic Specialist Conference
Pages
? - ? (6)
Citation
ARNOU, P., BOWERS, J.W. and WALLS, J.M., 2014. Aluminium-doped zinc oxide deposited by ultrasonic spray pyrolysis for thin film solar cell applications. Presented at: 2014 40th IEEE Photovoltaic Specialists Conference (PVSC), Denver, USA, 8-13 June, pp.0308-0313.
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