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Download fileAreal texture and angle measurements of tilted surfaces using focus variation methods
conference contribution
posted on 2013-01-25, 10:04 authored by Florine Hiersemenzel, Jon PetzingJon Petzing, Richard K. Leach, F. Helmli, Jagpal SinghOptical instruments for areal surface topography measurement have seen significant commercial development in the last five years, along with the ISO 25178 areal standard. Providing the user with confidence in new instruments depends on understanding instrument behavior and sources of error. Focus variation techniques rely on the inherent micro- or nano-scale roughness of a surface to allow acquisition of topography data. The work reported here has been examining the sensitivity of the focus variation technique to surface slope, using areal parameters to characterize surface roughness at extended slope values. The results illustrate links between instrument variables and slope characterization.
History
School
- Mechanical, Electrical and Manufacturing Engineering
Citation
HIERSEMENZEL, F. ... et al., 2012. Areal texture and angle measurements of tilted surfaces using focus variation methods. IN: Proceedings of the 3rd International Conference on Surface Metrology, Annecy, France, 21-23 March 2012, 5pp.Publisher
Universite de SavoieVersion
- AM (Accepted Manuscript)
Publication date
2012Notes
This is an ICSM'12 conference paper. The website is at: http://www.polytech.univ-savoie.fr/index.php?id=icsm2012ISBN
9782953616835Publisher version
Language
- en