Combinatorial study of Sn-Ti-W-O transparent conducting oxide thin films for photovoltaic applications

Gona, Michael; Isherwood, Patrick; Bowers, Jake; Walls, Michael

MePVSC847_0617120228_PVSC-44 IEEE 2017.pdf (910.13 kB)

Combinatorial study of Sn-Ti-W-O transparent conducting oxide thin films for photovoltaic applications

conference contribution

posted on 2017-10-23, 10:48 authored by Michael GonaMichael Gona, Patrick IsherwoodPatrick Isherwood, Jake BowersJake Bowers, Michael WallsMichael Walls

a combinatorial study of transparent conducting oxide thin films based on SnO2–TiO2-WO3 phase space is reported. These multinary oxide films were fabricated by magnetron reactive co-sputtering of tin monoxide (SnO), titanium (Ti) and tungsten (W) targets. SnO2–TiO2-WO3 film compositions with Ti/Sn ratio (0.02 – 0.12) and W/(Ti+Sn) ratio (0.02 – 0.25) were explored. The effect of oxygen partial pressure on composition, structure and optical properties was evaluated. High optical transparency above 80% across the visible spectrum was obtained for sputtered ternary SnO2-TiO2 oxide films for oxygen partial pressure >19.4%. A positive correlation between optical bandgap and Ti/Sn ratio was observed. However, optical properties deteriorated as Ti-content increased in the as-deposited SnO2-TiO2-WO3 films. All studied as-deposited SnO2-TiO2-WO3 thin films were found to be highly resistive. X-ray diffraction data indicated no long-range structural order.

History

School

Mechanical, Electrical and Manufacturing Engineering

Published in

44th IEEE Photovoltaics Specialist Conference (PVSC)

Citation

GONA, M. ...et al., 2017. Combinatorial study of Sn-Ti-W-O transparent conducting oxide thin films for photovoltaic applications. Presented at the 2017 IEEE 44th. Photovoltaic Specialists Conference (PVSC), Washington, D.C., June 25-30th, pp. 2349-2354.

Publisher

IEEE

Version

AM (Accepted Manuscript)

Acceptance date

2017-06-19

Publication date

2017

Notes

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