TPW_abstract_CCB_v2.pdf (67.45 kB)
Download fileFluorescence probe for determining the ozone dose delivered by plasmas
conference contribution
posted on 28.11.2014, 13:24 authored by Carlos Castello Beltran, Benjamin BuckleyBenjamin Buckley, Felipe IzaFelipe IzaPlasma composition is typically studied by absorption and emission spectroscopy, mass
spectrometry and computational studies. While these techniques provide valuable information
about the chemical species in the gas phase, in many applications it is desirable to have a
direct measurement of the dose of chemical species delivered to a particular target. In this
work, we will use a fluorescent chemical probe in order to characterize actual flux of ozone
experienced by a target exposed to plasma.
History
School
- Mechanical, Electrical and Manufacturing Engineering