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Fourier optics modelling of coherence scanning interferometers

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conference contribution
posted on 09.11.2021, 14:13 by Peter De Groot, Xavier Colonna de Lega, Rong Su, Jeremy CouplandJeremy Coupland, Richard Leach
We propose an instrument model for coherence scanning interferometry using familiar Fourier optics methods, the spectrum of plane waves, and the assumption that the light source spectral bandwidth is the dominant factor in determining fringe contrast as a function of optical path length. The model is straightforward to implement, is computationally efficient, and reveals many of the common error sources related to the optical filtering properties of the imaging system. We quantify the limits of applicability of the model related to the geometrical approximations for conventional Fourier optics, particularly for high numerical apertures, and when using the fringe contrast for determining surface heights. These limitations can be overcome by using a three-dimensional imaging model.

Funding

EMPIR program (20IND07) co-financed by the Participating States and from the European Union’s Horizon 2020 research and innovation program

Revisiting optical scattering with machine learning (SPARKLE)

Engineering and Physical Sciences Research Council

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History

School

  • Mechanical, Electrical and Manufacturing Engineering

Published in

Proceedings of SPIE. Applied Optical Metrology IV

Volume

11817

Source

SPIE Optical Engineering + Applications, 2021

Publisher

SPIE

Version

VoR (Version of Record)

Rights holder

© SPIE

Publisher statement

Copyright 2021 Society of Photo Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited.

Publication date

2021-08-05

Copyright date

2021

ISBN

9781510644724; 9781510644731

ISSN

0277-786X

eISSN

1996-756X

Language

en

Editor(s)

Erik Novak; James D. Trolinger; Christopher C. Wilcox

Location

San Diego

Event dates

1–5 August 2021

Depositor

Prof Jeremy Coupland. Deposit date: 8 November 2021

Article number

11817-23

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