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Fourier optics modelling of coherence scanning interferometers
conference contribution
posted on 2021-11-09, 14:13 authored by Peter De Groot, Xavier Colonna de Lega, Rong Su, Jeremy CouplandJeremy Coupland, Richard LeachWe propose an instrument model for coherence scanning interferometry using familiar Fourier optics methods, the spectrum of plane waves, and the assumption that the light source spectral bandwidth is the dominant factor in determining fringe contrast as a function of optical path length. The model is straightforward to implement, is computationally efficient, and reveals many of the common error sources related to the optical filtering properties of the imaging system. We quantify the limits of applicability of the model related to the geometrical approximations for conventional Fourier optics, particularly for high numerical apertures, and when using the fringe contrast for determining surface heights. These limitations can be overcome by using a three-dimensional imaging model.
Funding
EMPIR program (20IND07) co-financed by the Participating States and from the European Union’s Horizon 2020 research and innovation program
Revisiting optical scattering with machine learning (SPARKLE)
Engineering and Physical Sciences Research Council
Find out more...History
School
- Mechanical, Electrical and Manufacturing Engineering
Published in
Proceedings of SPIE. Applied Optical Metrology IVVolume
11817Source
SPIE Optical Engineering + Applications, 2021Publisher
SPIEVersion
- VoR (Version of Record)
Rights holder
© SPIEPublisher statement
Copyright 2021 Society of Photo Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited.Publication date
2021-08-05Copyright date
2021ISBN
9781510644724; 9781510644731ISSN
0277-786XeISSN
1996-756XPublisher version
Language
- en