High-throughput single-shot hyperspectral interferometer for areal profilometry based on microlens array integral field unit
A single-shot technique to measure areal profiles on optically smooth and rough surfaces and for applications in non-cooperative environments is presented. It is based on hyperspectral interferometry (HSI), a technique in which the output of a white-light interferometer provides the input to a hyperspectral imaging system. Previous HSI implementations suffered from inefficient utilisation of the available pixels which limited the number of measured coordinates and/or unambiguous depth range. In this paper a >20-fold increase in pixel utilization is achieved through the use of a 2-D microlens array as proposed for integral field units in astronomy applications. This leads to a 35×35 channel system with an unambiguous depth range of 0.88 mm.
P. D. Ruiz acknowledges The Royal Society (Industry Fellowship IF2012/R2) and industrial hosts Phase Vision Ltd. and Renishaw plc for their support. J. M. Huntley acknowledges the Engineering and Physical Sciences Research Council (EP/K018124/1) for its financial support.
- Mechanical, Electrical and Manufacturing Engineering