2020 High Rate Deposition of CdSe Thin Films by Pulsed DC Magnetron sputtering PVSC-2020-2020-743.pdf (627.26 kB)
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High rate deposition of CdSe thin films by pulsed DC magnetron sputtering

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The efficiency of cadmium telluride solar cells has recently been increased by adding selenium as a CdSeTe alloy at the front of the device. In this paper, we report on the use of pulsed dc magnetron sputtering to deposit thin films of Cadmium Selenide from a compound target. The deposition rates are surprisingly high and exceed 10nm/sec at a power of only 1. SkW on a 6 inch diameter target. The deposited thin films are dense and columnar. The thin films have been characterized using xRay diffraction, UV-vis Spectrophotometry, SEM, and Hall effect to analyse the structural, optical and electrical properties. Magnetron sputtering is widely used in thin film manufacturing and the high rates reported here make the use of pulsed dc sputtering an attractive industrial production technique for CdSe deposition in the CdSeTe device stack.

Funding

EPSRC (CDT-PV)

History

School

  • Mechanical, Electrical and Manufacturing Engineering

Research Unit

  • Centre for Renewable Energy Systems Technology (CREST)

Published in

2020 47th IEEE Photovoltaic Specialists Conference (PVSC)

Pages

2132 - 2135

Source

2020 IEEE 47th Photovoltaic Specialists Conference (PVSC)

Publisher

IEEE

Version

AM (Accepted Manuscript)

Rights holder

© IEEE

Publisher statement

© 2020 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

Publication date

2021-01-05

Copyright date

2020

ISBN

9781728161150

Language

en

Location

Virtual

Event dates

15th June 2020 - 21st August 2020

Depositor

Prof Michael Walls. Deposit date: 18 January 2021