METROLOGY OF SILICON PHOTOVOLTAIC CELLS USING COHERENCE.pdf (726.17 kB)
Metrology of silicon photovoltaic cells using coherence correlation interferometry
conference contribution
posted on 2014-05-23, 09:14 authored by Bianca Maniscalco, Piotr Kaminski, M. Conroy, D. Mansfield, Y. Yu, Kevin BassKevin Bass, Gianfranco ClaudioGianfranco Claudio, Michael WallsMichael WallsSurface metrology plays an important role in the
development and manufacture of photovoltaic cells and
modules. Coherence Correlation Interferometry (CCI) is a
non-contacting surface metrology tool with potentially
important applications in the characterization of
photovoltaic devices. Its major advantages are that it is
fast, non-destructive and it takes its data from a relatively
large and hence representative area. A special mode,
called “stitching x-y” can be used to provide information on
a wider area, combining measurements taken in different
zones of the sample. The technique is capable of
providing surface roughness and step height
measurements with sub-nanometre precision. It is also
capable of measuring quantitatively surface texture and
surface form in three dimensions and it now has a new
capability to measure thin film and thick film thickness.
CCI measurements are presented on a range of features
on silicon photovoltaic cells including surface roughness,
surface texture, the profile of laser grooves for buried
contacts as well as the roughness and thickness of silicon
nitride thin films. Complementary analysis using
spectroscopic ellipsometry is also presented for
verification. CCI is a sensitive, non-destructive metrology
technique with potential use as an in-line quality
assurance tool in the large scale production of
photovoltaic modules.
History
School
- Mechanical, Electrical and Manufacturing Engineering
Research Unit
- Centre for Renewable Energy Systems Technology (CREST)
Citation
MANISCALCO, B. ... et al., 2011. Metrology of silicon photovoltaic cells using coherence correlation interferometry. IN: 37th IEEE Photovoltaic Specialists Conference (PVSC), Seattle, 19-24 June 2011, pp. 3370 - 3374.Publisher
© IEEEVersion
- AM (Accepted Manuscript)
Publication date
2011Notes
This conference paper [© IEEE] is also available at: http://www.ieee.org/conferences_events/. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.ISSN
0160-8371Publisher version
Language
- en