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Physical vapour deposition of NbTiN thin films for superconducting RF cavities.

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conference contribution
posted on 24.08.2017, 09:45 by Stuart Wilde, Reza Valizadeh, O.B. Malyshev, G.B.G. Stenning, A. Hannah, S. Pattalwar, N. Pattalwar, N.P. Barradas, E. Alves, Boris Chesca
The production of superconducting coatings for radio frequency (RF) cavities is a rapidly developing field that should ultimately lead to acceleration gradients greater than those obtained by bulk Nb RF cavities. The use of thin films made from superconductors with thermodynamic critical field, Hc > HC(Nb), allows the possibility of multilayer superconductor – insulator – superconductor (SIS) films and accelerators that could operate at temperatures above 2 K. SIS films theoretically allow increased acceleration gradient due to magnetic shielding of underlying superconducting layers [1] and higher operating temperature can reduce cost [2]. High impulse magnetron sputtering (HiPIMS) and pulsed DC magnetron sputtering processes were used to deposit NbTiN thin films onto Si(100) substrate. The films were characterised using scanning electron microscopy (SEM), x-ray diffraction (XRD), Rutherford back-scattering spectroscopy (RBS) and a four-point probe.

History

School

  • Science

Department

  • Physics

Published in

8th International Particle Accelerator Conference, IPAC2017 http://accelconf.web.cern.ch/AccelConf/ipac2017/

Volume

MOPVA104

Issue

T07

Pages

1102 - 1104 (3)

Citation

WILDE, S. ...et al., 2017. Physical vapour deposition of NbTiN thin films for superconducting RF cavities. IN: Arduini, G. ...et al. (eds.). Proceedings of the 8th International Particle Accelerator Conference, (IPAC2017), Copenhagen, Denmark, 14-19th May, pp. 1102 - 1104.

Publisher

© The Authors. Published by JACoW

Version

VoR (Version of Record)

Publisher statement

This work is made available according to the conditions of the Creative Commons Attribution 3.0 Unported (CC BY 3.0) licence. Full details of this licence are available at: http://creativecommons.org/licenses/by/3.0/

Acceptance date

19/05/2017

Publication date

2017

Notes

This is an Open Access Article. It is published by JACoW under the Creative Commons Attribution 3.0 Unported Licence (CC BY). Full details of this licence are available at: http://creativecommons.org/licenses/by/3.0/

ISBN

9783954501823

Language

en

Location

Copenhagen, Denmark

Licence

Exports

Loughborough Publications

Keywords

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Exports