Residual Flatness Paper Lupin.pdf (190.18 kB)
Download fileThe assessment of residual flatness errors in focus variation areal measuring instruments
conference contribution
posted on 2013-01-25, 09:06 authored by Florine Hiersemenzel, Jagpal Singh, Jon PetzingJon Petzing, Richard K. Leach, F. Helmli, R. DanzlOptical instruments for areal surface topography measurement rely on high-precision lenses that guide the light from the object surface to the image plane. Lens aberrations may cause distortion of the transmitted image and consequently a residual flatness error in the measurement data. Previous work at NPL suggests using an averaging method for residual flatness error assessment for optical surface topography instruments. However, the averaging method does not apply to the focus variation technique, which relies on the nano-scale roughness of a surface to allow acquisition of topography data. This paper presents alternative methods for measuring residual flatness for focus variation instruments.
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