Aluminium-doped zinc oxide (AZO) thin films have been deposited on glass substrates using ultrasonic spray deposition whilst varying the operational parameters. Electrical and optical properties were investigated as a function of the deposition parameters and the optimum conditions were defined. The optimum parameters result to films with a sheet resistance of ~6kΩ/□ when they are as deposited and to ~1kΩ/□ for annealed films in vacuum. The resulting transparency ranges from 80 to 85% for optimum films.
Funding
The authors are grateful to EPSRC Supergen for funding to support this project.
History
School
Mechanical, Electrical and Manufacturing Engineering
Published in
9th Photovoltaic Science, Applications and Technology Conference
Pages
231 - 234 (4)
Citation
ARNOU, P., BOWERS, J.W. and WALLS, J.M., 2013. Ultrasonically sprayed aluminium-doped zinc oxide layers for transparent conductive oxide in thin film solar cells. In: Hutchins, M., Cole, A. and Watson, T. (eds.). Proceedings of 2013 9th Photovoltaic Science, Applications and Technology Conference (PVSAT-9), Swansea, Great Britain, 10-12 April, pp. 231-234.
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