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Coherence scanning interferometry: linear theory of surface measurement

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journal contribution
posted on 10.10.2013 by Jeremy Coupland, Rahul Mandal, Kanik Palodhi, Richard K. Leach
The characterization of imaging methods as three-dimensional (3D) linear filtering operations provides a useful way to compare the 3D performance of optical surface topography measuring instruments, such as coherence scanning interferometry, confocal and structured light microscopy. In this way, the imaging system is defined in terms of the point spread function in the space domain or equivalently by the transfer function in the spatial frequency domain. The derivation of these characteristics usually involves making the Born approximation, which is strictly only applicable to weakly scattering objects; however, for the case of surface scattering, the system is linear if multiple scattering is assumed to be negligible and the Kirchhoff approximation is assumed. A difference between the filter characteristics derived in each case is found. However this paper discusses these differences and explains the equivalence of the two approaches when applied to a weakly scattering object.

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School

  • Mechanical, Electrical and Manufacturing Engineering

Citation

COUPLAND, J.M. ... et al, 2013. Coherence scanning interferometry: linear theory of surface measurement. Applied Optics, 52 (16), pp.3662-3670.

Publisher

© Optical Society of America

Version

VoR (Version of Record)

Publication date

2013

Notes

This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.52.003662. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.

ISSN

0003-6935

eISSN

1539-4522

Language

en

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