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Dynamics and particle fluxes in atmospheric-pressure electronegative radio frequency microplasmas

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posted on 01.08.2016 by Kirsty McKay, Ding-Xin Liu, Ming-Zhe Rong, Felipe Iza, Michael G. Kong
We report on intricate dynamics observed in atmospheric-pressure rf electronegative discharges where electrons and anions are separated due to their different mobilities. This results in the formation of positively charged regions between an electronegative plasma core and an oscillating electron ensemble. It is found that for a given input power, the electron, ion (both positive and negative) and neutral fluxes increase as the gap size is reduced, resulting in a more efficient delivery of chemical species to a treated target.

Funding

This work was supported by the Engineering Physical Science Research Council of UK and the Fundamental Research Funds for the Central Universities of China.

History

School

  • Mechanical, Electrical and Manufacturing Engineering

Published in

APPLIED PHYSICS LETTERS

Volume

99

Issue

9

Pages

? - ? (3)

Citation

MCKAY, K. ... et al., 2011. Dynamics and particle fluxes in atmospheric-pressure electronegative radio frequency microplasmas. Applied Physics Letters, 99, 091501, doi: 10.1063/1.3631758.

Publisher

© American Institute of Physics

Version

AM (Accepted Manuscript)

Publisher statement

This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0) licence. Full details of this licence are available at: https://creativecommons.org/licenses/by-nc-nd/4.0/

Publication date

2011

ISSN

0003-6951

eISSN

1077-3118

Language

en

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