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Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas

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journal contribution
posted on 25.08.2009 by D.W. Liu, Felipe Iza, Michael G. Kong
In atmospheric-pressure plasmas the main electron heating mechanism is Ohmic heating, which has distinct spatial and temporal evolutions in the α and γ modes. In γ discharges, ionizing avalanches in the sheaths are initiated not only by secondary electrons but also by metastable pooling reactions. In α discharges, heating takes place at the sheath edges and in contrast with low-pressure plasmas, close to 50% of the power absorbed by the electrons is absorbed at the edge of the retreating sheaths. This heating is due to a field enhancement caused by the large collisionality in atmospheric-pressure discharges.

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  • Mechanical, Electrical and Manufacturing Engineering

Citation

LIU, D.W., IZA, F. and KONG, M.G., 2008. Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas. Applied Physics Letters, 93(26), article 261503, pp.1-3.

Publisher

© American Institute of Physics

Version

VoR (Version of Record)

Publication date

2008

Notes

Copyright 2008 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the authors and the American Institute of Physics. This article appeared in the journal, Applied Physics Letters, and may be found at: http://link.aip.org/link/?APPLAB/93/261503/1

ISSN

0003-6951;1077-3118

Language

en

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