Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas
journal contributionposted on 25.08.2009 by D.W. Liu, Felipe Iza, Michael G. Kong
Any type of content formally published in an academic journal, usually following a peer-review process.
In atmospheric-pressure plasmas the main electron heating mechanism is Ohmic heating, which has distinct spatial and temporal evolutions in the α and γ modes. In γ discharges, ionizing avalanches in the sheaths are initiated not only by secondary electrons but also by metastable pooling reactions. In α discharges, heating takes place at the sheath edges and in contrast with low-pressure plasmas, close to 50% of the power absorbed by the electrons is absorbed at the edge of the retreating sheaths. This heating is due to a field enhancement caused by the large collisionality in atmospheric-pressure discharges.
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