Range (i.e., absolute distance), displacement and velocity of a moving target have
been measured with a Frequency Scanning Interferometer that incorporates a 100,000 scan s-1
VCSEL laser with 100-nm tuning range. An Adaptive Delay Line in the reference beam,
consisting of a chain of switchable exponentially-growing optical delays, reduced modulation
frequencies to sub-GHz levels. Range, displacement and velocity were determined from the
phase of the interference signal; fine alignment and linearization of the scans was achieved
from the interferogram of an independent reference interferometer. Sub-nm displacement
resolution, sub-100-nm range resolution, and velocity resolution of 12 μm s-1 have been
demonstrated over a depth measurement range of 300 mm.
- Mechanical, Electrical and Manufacturing Engineering
Published inJournal of the Optical Society of America A
PublisherThe Optical Society
VersionAM (Accepted Manuscript)
Rights holder© Optical Society of America
Publisher statement© 2020 Optical Society of America]. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited.
DepositorProf Jonathan Huntley. Deposit date: 6 October 2020