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Single-shot profilometry of rough surfaces using hyperspectral interferometry

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posted on 03.10.2013, 10:24 by Taufiq Widjanarko, Jonathan Huntley, Pablo Ruiz
The combination of white light interferometry with hyperspectral imaging (“hyperspectral interferometry”) is a recently proposed technique for single-shot measurement of 3D surface profiles. We consider for the first time its application to speckled wavefronts from optically rough surfaces. The intensity versus wavenumber signal at each pixel provides unambiguous range information despite the speckle-induced random phase shifts. Experimental results with samples undergoing controlled rigid body translation demonstrate a measurement repeatability of 460 nm for a bandwidth of approximately 30 nm. Potential applications include roughness measurement and coordinate measurement machine probes where rapid data acquisition in noncooperative environments is essential.

History

School

  • Mechanical, Electrical and Manufacturing Engineering

Citation

WIDJANARKO, T., HUNTLEY, J.M. and RUIZ, P.D., 2012. Single-shot profilometry of rough surfaces using hyperspectral interferometry. Optics Letters, 37 (3), pp. 350 - 352.

Publisher

© Optical Society of America

Version

VoR (Version of Record)

Publication date

2012

Notes

This paper was published in Optics Letters and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/ol/abstract.cfm?uri=ol-37-3-350 Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.

ISSN

0146-9592

Language

en

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