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The mathematical modelling of focussed ion beam systems
journal contributionposted on 29.01.2014 by Robert J. Amos, G.A. Evans, Roger Smith
Any type of content formally published in an academic journal, usually following a peer-review process.
Computer simulation of focused ion beam systems plays an important role in the design of many scientific instruments. This paper describes a computational technique which has been developed for medium sized computers and which has been applied to a number of instrument design applications . The applications include individual ion lcn cs, extraction optics for ions in surface analytical instruments and the design of columns for ion beam lithography.
- Mathematical Sciences