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The mathematical modelling of focussed ion beam systems
journal contributionposted on 29.01.2014, 10:19 by Robert J. Amos, G.A. Evans, Roger Smith
Computer simulation of focused ion beam systems plays an important role in the design of many scientific instruments. This paper describes a computational technique which has been developed for medium sized computers and which has been applied to a number of instrument design applications . The applications include individual ion lcn cs, extraction optics for ions in surface analytical instruments and the design of columns for ion beam lithography.
- Mathematical Sciences