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The mathematical modelling of focussed ion beam systems

journal contribution
posted on 29.01.2014 by Robert J. Amos, G.A. Evans, Roger Smith
Computer simulation of focused ion beam systems plays an important role in the design of many scientific instruments. This paper describes a computational technique which has been developed for medium sized computers and which has been applied to a number of instrument design applications . The applications include individual ion lcn cs, extraction optics for ions in surface analytical instruments and the design of columns for ion beam lithography.

History

School

  • Science

Department

  • Mathematical Sciences

Citation

AMOS, R.J., EVANS, G.A. and SMITH, R., 1987. The mathematical modelling of focussed ion beam systems. Mathematical Engineering in Industry, 1 (3), pp. 191 - 213.

Publisher

© VNU Science Press

Version

VoR (Version of Record)

Publication date

1987

Notes

Closed access. This article was published in the journal, Mathematical Engineering in Industry [© VNU Science Press].

ISSN

0169-121X

Language

en

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