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2500-Channel single-shot areal profilometer using hyperspectral interferometry with a pinhole array

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journal contribution
posted on 02.07.2019, 07:44 by Tobias Reichold, Pablo RuizPablo Ruiz, Jonathan M. Huntley
Surface profilometry techniques such as coherent scanning interferometry or focus variation require long scan times and are thus vulnerable to environmental disturbance. Hyperspectral interferometry (HSI) overcomes the problem by recording all the spatial and spectral information necessary to reconstruct a 2D surface height map in a single shot. In this paper, we present a new HSI system that uses a pinhole array to provide the necessary gaps for the spectral information. It is capable of measuring 2500 independent points, twice the previous maximum number, with a maximum unambiguous depth range of ∼825 µm and a larger maximum surface tilt angle of 33.3 mrad. The use of phase information allows height to be measured to a precision of ∼6 nm, an order of magnitude improvement on previous HSI systems.

Funding

EPSRC Centre for Doctoral Training in Embedded Intelligence (EP/L014998/1), EPSRC Future Metrology Hub (EP/P006930/1) and Renishaw Plc.

History

School

  • Mechanical, Electrical and Manufacturing Engineering

Published in

Optics and Lasers in Engineering

Volume

122

Pages

37 - 48

Citation

REICHOLD, T.V., RUIZ, P.D. and HUNTLEY, J.M., 2019. 2500-Channel single-shot areal profilometer using hyperspectral interferometry with a pinhole array. Optics and Lasers in Engineering, 122, pp.37-48.

Publisher

Elsevier © The Authors

Version

VoR (Version of Record)

Publisher statement

This work is made available according to the conditions of the Creative Commons Attribution 4.0 International (CC BY 4.0) licence. Full details of this licence are available at: http://creativecommons.org/licenses/ by/4.0/

Acceptance date

14/05/2019

Publication date

2019-05-25

Copyright date

2019

Notes

This is an Open Access article. It is published by Elsevier under the Creative Commons Attribution 4.0 International Licence (CC BY). Full details of this licence are available at: http://creativecommons.org/licenses/by/4.0/

ISSN

0143-8166

Language

en