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900-channel single-shot surface roughness measurement using hyperspectral interferometry
journal contribution
posted on 2019-12-05, 13:38 authored by Tobias Reichold, Pablo RuizPablo Ruiz, Jonathan HuntleyA recently developed hyperspectral interferometer has been applied, for the first time, to the single-shot measurement of surface roughness. Traditional optical surface profiling techniques, such as coherence scanning interferometry (CSI) or focus variation microscopy, require long scan times and mechanical motion of the imaging objectives, making them vulnerable to environmental disturbances and thus inappropriate as an embedded metrology tool for production. Hyperspectral interferometry (HSI) answers these problems by capturing spatial and spectral information to reconstruct the surface profile, from 900 locations measured in parallel, in a single shot. We report here measurement results with both HSI and CSI from 12 individual roughness samples taken from Rubert roughness gauges covering the roughness range π
π
ππ = 0.025 β 50 ππππ. Very good agreement was obtained for ππππ values in the range 3 β 30 Β΅m, where the HSI ππππ values were mostly within a few per cent of (and at worst 24% away from) those measured by CSI ππππ. An alternative measure of roughness, based on averaging the widths of the Fourier transform peak of the individual HSI interference signals, is shown to be a statistically reliable measure of local roughness in the medium to high roughness regime, i.e. for ππππvalues of 0.8 Β΅m and above. The results thus demonstrate the techniqueβs potential for real-time surface quality inspection in manufacturing.
Funding
EPSRC Centre for Doctoral Training in Embedded Intelligence (EP/L014998/1),
EPSRC Future Metrology Hub (EP/P006930/1)
History
School
- Mechanical, Electrical and Manufacturing Engineering
Published in
Measurement Science and TechnologyVolume
31Issue
4Publisher
IOP PublishingVersion
- AM (Accepted Manuscript)
Rights holder
Β© IOP Publishing LtdPublisher statement
This is an Open Access Article. It is published by IOP under the Creative Commons Attribution 3.0 Unported Licence (CC BY). Full details of this licence are available at: http://creativecommons.org/licenses/by/3.0/Acceptance date
2019-12-04Publication date
2020-01-14Copyright date
2020ISSN
0957-0233eISSN
1361-6501Publisher version
Language
- en
Depositor
Dr Pablo Ruiz Deposit date: 4 December 2019Article number
045014Usage metrics
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