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Download fileDynamics and particle fluxes in atmospheric-pressure electronegative radio frequency microplasmas
journal contribution
posted on 2016-08-01, 09:59 authored by Kirsty McKay, Ding-Xin Liu, Ming-Zhe Rong, Felipe IzaFelipe Iza, Michael G. KongWe report on intricate dynamics observed in atmospheric-pressure rf electronegative discharges
where electrons and anions are separated due to their different mobilities. This results in the
formation of positively charged regions between an electronegative plasma core and an oscillating
electron ensemble. It is found that for a given input power, the electron, ion (both positive and
negative) and neutral fluxes increase as the gap size is reduced, resulting in a more efficient
delivery of chemical species to a treated target.
Funding
This work was supported by the Engineering Physical Science Research Council of UK and the Fundamental Research Funds for the Central Universities of China.
History
School
- Mechanical, Electrical and Manufacturing Engineering
Published in
APPLIED PHYSICS LETTERSVolume
99Issue
9Pages
? - ? (3)Citation
MCKAY, K. ... et al., 2011. Dynamics and particle fluxes in atmospheric-pressure electronegative radio frequency microplasmas. Applied Physics Letters, 99, 091501, doi: 10.1063/1.3631758.Publisher
© American Institute of PhysicsVersion
- AM (Accepted Manuscript)
Publisher statement
This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0) licence. Full details of this licence are available at: https://creativecommons.org/licenses/by-nc-nd/4.0/Publication date
2011ISSN
0003-6951eISSN
1077-3118Publisher version
Language
- en