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Effect of bias voltage on microstructure and mechanical properties of nanocomposite ZrCN films deposited by filtered cathodic vacuum arc
journal contribution
posted on 2020-04-01, 11:07 authored by Han Zhou, Fu-Zeng Zhou, Yong-Qing Shen, Bin Liao, Jing-Jing Yu, Xu ZhangNanocomposite ZrCN films consisting of nanocrystalline ZrCN grains embedded in nitrogen-doped amorphous carbon film are deposited by filtered cathodic vacuum arc technology under different bias voltages ranging from 50 to 400 V. The influence of bias voltage on the characterization and the mechanical properties of the ZrCN films are investigated by x-ray diffraction, x-ray photoelectron spectroscopy, scanning electron microscopy, transmission electron microscopy, Raman spectroscopy and nano-indentation. The bias voltage has a subtle effect on the ZrCN grain size, which is around 9.5 nm and keeps almost constant. A slight increase of the bias voltage induces a relatively high sp 3 fraction about 40% in N-doped amorphous C films but leads to the graphitization of the films under a higher voltage. The best mechanical property of the ZrCN film with the hardness of 41 GPa is obtained under the bias voltage of 200 V, indicating the positive effect of slight increase of ion bombardment on the hardness of the films.
Funding
Natural Science Foundation of China under Grant No 51171028
History
School
- Mechanical, Electrical and Manufacturing Engineering
Published in
Chinese Physics LettersVolume
35Issue
6Publisher
IOP PublishingVersion
- VoR (Version of Record)
Rights holder
© Chinese Physical Society and IOP Publishing LtdPublication date
2018-05-31Copyright date
2018ISSN
0256-307XeISSN
1741-3540Publisher version
Language
- en
Depositor
Dr HAN ZHOU. Deposit date: 31 March 2020Article number
066202Usage metrics
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