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Effects of defocus on the transfer function of coherence scanning interferometry

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posted on 20.04.2018, 10:54 by Rong Su, Matthew Thomas, Richard K. Leach, Jeremy Coupland
© 2018 Optical Society of America. Coherence scanning interferometry (CSI) offers three-dimensional (3D) measurement of surface topography with high precision and accuracy. Defocus within the interferometric objective lens, however, is commonly present in CSI measurements and reduces both the resolving power of the imaging system and the ability to measure tilted surfaces. This Letter extends the linear theory of CSI to consider the effects of defocus on the 3D transfer function and the point spread function in an otherwise ideal CSI instrument. The results are compared with measurements of these functions in a real instrument. This work provides further evidence for the validity of the linear systems theory of CSI.

Funding

This work was supported by the Engineering and Physical Sciences Research Council (EPSRC) (EP/M008983/1); European Metrology Programme for Innovation and Research (EMPIR) project FreeFORM (15SIB01).

History

School

  • Mechanical, Electrical and Manufacturing Engineering

Published in

Optics Letters

Volume

43

Issue

1

Pages

82 - 85

Citation

SU, R. ...et al., 2018. Effects of defocus on the transfer function of coherence scanning interferometry. Optics Letters, 43(1), pp. 82-85.

Publisher

© Optical Society of America

Version

VoR (Version of Record)

Publisher statement

This work is made available according to the conditions of the Creative Commons Attribution 4.0 International (CC BY 4.0) licence. Full details of this licence are available at: http://creativecommons.org/licenses/ by/4.0/

Acceptance date

06/11/2017

Publication date

2017-12-21

Copyright date

2018

Notes

This is an Open Access Article. It is published by Optical Society of America under the Creative Commons Attribution 4.0 Unported Licence (CC BY). Full details of this licence are available at: http://creativecommons.org/licenses/by/4.0/

DOI

ISSN

0146-9592

eISSN

1539-4794

Publisher version

Language

en

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Effects of defocus on the transfer function of coherence scanning interferometry
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CC BY 4.0

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