posted on 2009-08-26, 11:59authored byXu-Tao Deng, Michael G. Kong
Diffuse nonthermal gas discharges generated at atmospheric
pressure have found increasing applications in many
key materials processing areas such as etching, deposition, and
structural modification of polymeric surfaces. To facilitate tailored
and improved applications of these novel gas plasmas, we consider
their pulsed generation based on one-dimensional numerical simulation
of helium-nitrogen discharges.We consider four waveforms
of the plasma-generating voltage, namely: 1) sinusoidal; 2) peaklevelled
sinusoidal; 3) peak-levelled and tail-trimmed sinusoidal;
and 4) pulsed with a Gaussian-shaped tail, all at the same repetition
frequency of 10 kHz. For each case, voltage and current
characteristics are calculated and then used to assess whether the
generated plasma is diffuse and nonthermal. Densities of electrons,
ions, and metastables are calculated, together with the dissipated
electric power in the plasma bulk. It is found that plasma pulsing
can significantly reduce the electric power needed to sustain diffuse
nonthermal atmospheric plasmas. Specifically by choosing appropriate
pulse shape, the plasma-sustaining power can be reduced by
more than 50% without reducing densities of electrons, ions, and
metastables. On the other hand, electron density can be enhanced
by 68% with the same input electric power if the pulsewidth is suitably
narrowed.
History
School
Mechanical, Electrical and Manufacturing Engineering
Citation
DENG, X.T. and KONG, M.G., 2003. Electrically efficient production of a diffuse nonthermal atmospheric plasma. IEEE Transactions on Plasma Science, 31(1), pt.1, pp.7-18.