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Electron and ion kinetics in a micro hollow cathode discharge
journal contributionposted on 2008-02-25, 11:05 authored by G.J. Kim, Felipe IzaFelipe Iza, Jae Koo Lee
Electron and ion kinetics in a micro hollow cathode discharge are investigated by means of two-dimensional axisymmetric particle-in-cell Monte Carlo collision simulations. Argon discharges at 10 and 300 Torr are studied for various driving currents. Electron and ion energy probability functions (IEPF) are shown at various times and locations to study the spatio-temporal behaviour of the discharge. The electron energy probability function (EEPF) evolves from the Druyvesteyn type in the early stages of the discharge into a two (or three) temperature distribution when steady state is reached. In steady state, secondary electrons accelerated across the cathode fall populate the high energy tail of the EEPF while the low energy region is populated by trapped electrons. The IEPF evolves from a Maxwellian in the negative glow (bulk) to a two temperature distribution on the cathode surface. The overpopulation of low energy ions near the cathode surface is attributed to a larger collision cross section for low energy ions and ionization within the cathode fall.
- Mechanical, Electrical and Manufacturing Engineering
CitationKIM, G.J., IZA, F. and LEE, J.K., 2006. Electron and ion kinetics in a micro hollow cathode discharge. Journal of Physics D: Applied Physics, 39, pp. 4386–4392.
Publisher© Institute of Physics Publishing
NotesThis article is Closed Access. It was published in the journal, Journal of Physics D: Applied Physics [© Institute of Physics Publishing]. The definitive version (doi:10.1088/0022-3727/39/20/014) is available at: http://www.iop.org/EJ/journal/JPhysD