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Evaluation of the performance of tilt scanning interferometry for tomographic imaging and profilometry

journal contribution
posted on 13.02.2015, 16:21 by Bona S.H. Burlison, Pablo Ruiz, Jonathan Huntley
In this paper we investigate the performance of Tilt Scanning Interferometry in tomographic imaging and profilometry applications, with an emphasis on the factors that limit the quality of image reconstruction. Depth resolution is mainly degraded by a frequency chirp that appears in the temporal interference signal when a large tilting range is scanned. It is shown through a numerical simulation that the chirp depends on the curvature of the illumination wavefront and also on the position of the pivot axis of the illumination beam. Data processing methods are proposed to overcome these limitations and their effects are illustrated with experimental measurements of opaque surfaces and a weakly scattering phantom with internal features. The effect of speckle decorrelation is also discussed.

History

School

  • Mechanical, Electrical and Manufacturing Engineering

Published in

OPTICS COMMUNICATIONS

Volume

285

Issue

7

Pages

1654 - 1661 (8)

Citation

BURLISON, B.S.H., RUIZ, P.D. and HUNTLEY, J.M., 2012. Evaluation of the performance of tilt scanning interferometry for tomographic imaging and profilometry. Optics Communications, 285 (7), pp. 1654 - 1661.

Publisher

© Elsevier B.V.

Version

VoR (Version of Record)

Publisher statement

This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0) licence. Full details of this licence are available at: https://creativecommons.org/licenses/by-nc-nd/4.0/

Publication date

2012

Notes

This article is closed access.

ISSN

0030-4018

Language

en