posted on 2020-04-03, 13:19authored byAmal HajjajAmal Hajjaj, N Jaber, S Ilyas, FK Alfosail, MI Younis
Micro and nanoelectromechanical systems M/NEMS have been extensively investigated and exploited in the past few
decades for various applications and for probing fundamental physical phenomena. Understanding the linear and
nonlinear dynamical behaviors of the movable structures in these systems is crucial for their successful implementation
in various novel technologies and to meet the long list of new sophisticated requirements. This paper presents a review
for some of the recent topics pertaining to the dynamical behaviors, linear and nonlinear, of M/NEMS resonating
structures. First, an overview is presented of the various used dynamical approaches to enhance the sensitivity of
resonators for sensing applications. Then a summary is presented of the recent works on the linear and nonlinear mode
coupling in M/NEMS resonator. Next, recent research is reviewed on coupled M/NEMS resonators, mechanically and
electrically, leading to collective behaviors like mode localization. The final part of the paper discusses analytical
approaches that have been developed to better understand and investigate the dynamical behavior of M/NEMS
resonators focusing on the perturbation method the multiple time scales.
History
School
Mechanical, Electrical and Manufacturing Engineering
This paper was accepted for publication in the journal International Journal of Non-Linear Mechanics and the definitive published version is available at https://doi.org/10.1016/j.ijnonlinmec.2019.103328