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Mode characteristics of radio-frequency atmospheric glow discharges

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journal contribution
posted on 27.08.2009, 11:16 by J.J. Shi, Michael G. Kong
Building on recent experimental and numerical evidence of different glow modes in atmospheric plasmas, this paper reports a systematic study of these modes in radio-frequency (RF) glow discharges in atmospheric helium. Using a one-dimensional (1-D) hybrid computer model, we present detailed characterization of three glow modes, namely the α mode, the α - γ transitional mode, and the γ-mode in a 13.56-MHz atmospheric glow discharge over a wide range of root mean square (RMS) current density from 5 m A / cm2 to 110 m A / cm2. Our focus is on sheath dynamics through spatial and temporal profiles of charged densities, electric field, electron mean energy, sheath thickness, and sheath voltage, and when appropriate our results are compared against experimental data of atmospheric glow discharges and that of glow discharges at reduced gas pressure below 1 torr. Fundamental characteristics of the three glow modes are shown to be distinctively different, and these can be used as a hitherto unavailable route to tailor the operation of radio-frequency atmospheric glow discharges to their intended applications.

History

School

  • Mechanical, Electrical and Manufacturing Engineering

Citation

SHI, J.J. and KONG, M.G., 2005. Mode characteristics of radio-frequency atmospheric glow discharges. IEEE Transactions on Plasma Science, 33(2), pt.2, pp. 624-630.

Publisher

© IEEE

Version

VoR (Version of Record)

Publication date

2005

Notes

This article was published in the journal, IEEE Transactions on Plasma Science [© 2005 IEEE] and is also available at: http://ieeexplore.ieee.org/ Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

ISSN

0093-3813

Language

en