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Modeling of interference microscopy beyond the linear regime

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journal contribution
posted on 25.03.2021, 11:42 by Matthew Thomas, Rong Su, Nikolay Nikolaev, Jeremy CouplandJeremy Coupland, Richard Leach
© The Authors. Coherence scanning interferometry (CSI), a type of interference microscopy, has found broad applications in the advanced manufacturing industry, providing high-accuracy surface topography measurement. Enhancement of the metrological capability of CSI for complex surfaces, such as those featuring high slopes and spatial frequencies and high aspect-ratio structures, requires advances in modeling of CSI. However, current linear CSI models relying on approximate surface scattering models cannot accurately predict the instrument response for surfaces with complex geometries that cause multiple scattering. A boundary elements method is used as a rigorous scattering model to calculate the scattered field at a distant boundary. Then, the CSI signal is calculated by considering the holographic recording and reconstruction of the scattered field. Through this approach, the optical response of a CSI system can be predicted for almost any arbitrary surface geometry.

Funding

Metrology for precision and additive manufacturing

Engineering and Physical Sciences Research Council

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European Union’s Horizon 2020 Research and Innovation Programme (MNR4SCell, 734174)

History

School

  • Mechanical, Electrical and Manufacturing Engineering

Published in

Optical Engineering

Volume

59

Issue

3

Publisher

SPIE

Version

VoR (Version of Record)

Rights holder

© The authors

Publisher statement

This is an Open Access Article. It is published by SPIE under the Creative Commons Attribution 4.0 Unported Licence (CC BY). Full details of this licence are available at: http://creativecommons.org/licenses/by/4.0/

Acceptance date

13/03/2020

Publication date

2020-03-25

Copyright date

2020

ISSN

0091-3286

eISSN

1560-2303

Language

en

Depositor

Prof Jeremy Coupland. Deposit date: 19 March 2021

Article number

034110