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Particle-in-cell Monte Carlo and fluid simulations of argon-oxygen plasma : comparisons with experiments and validations
journal contribution
posted on 2008-02-25, 14:24 authored by S.H. Lee, Felipe Iza, Jae Koo LeeParticle-in-cell Monte Carlo collision (PIC-MCC) and fluid simulations of argon-oxygen plasmas in
capacitively and inductively coupled plasma reactors are presented. Potential profiles and electron/
ion kinetic information such as electron/ion energy distributions and temperatures are compared
with experimental data as well as with other analytical and numerical results. One-dimensional
PIC-MCC simulations compare favorably with experimental data obtained in capacitively coupled
reactors over a wide range of pressure and power. Two-dimensional fluid simulations of capacitive
discharges differs from the results of PIC-MCC simulations as nonlocal effects play an important
role in these discharges. Fluid simulations as nonlocal inductively coupled plasmas, however, agree
favorably with experimental observations.
History
School
- Mechanical, Electrical and Manufacturing Engineering
Citation
LEE, S.H., IZA, F. and LEE, J.K., 2006. Particle-in-cell Monte Carlo and fluid simulations of argon-oxygen plasma : comparisons with experiments and validations. Physics of plasmas, 13, 057102Publisher
© American Institute of PhysicsPublication date
2006Notes
This article was published in the journal, Physics of plasmas and is also available at: http://pop.aip.org/pop/top.jsp or http://dx.doi.org/10.1063/1.2179430ISSN
1070-664XLanguage
- en